2026-07-16
In June 2026, Hubei Longzhong Laboratory (led by Wuhan University of Technology) successfully developed a new silicon nitride ceramic that sets a new performance record for silicon nitride ceramics produced by liquid-phase sintering.
Silicon nitride ceramic is a critical material for lithography and etching equipment. In traditional processes, high-temperature firing compromises hardness, while low-temperature firing weakens toughness – making it impossible to achieve both properties simultaneously.
The research team created an original symbiotic columnar cluster microstructure – building countless microscopic "reinforced concrete units" within the material. This fundamentally resolves the trade-off between hardness, toughness, and strength, achieving simultaneous improvements across all three properties.
| Parameter | Value |
|---|---|
| Temperature resistance | Structurally stable at 1600°C |
| Hardness | Second only to diamond |
| Weight | Only 40% of traditional alloys |
| Additional properties | Wear-resistant, corrosion-resistant, high thermal conductivity, transparent to waves, biocompatible |
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Semiconductor equipment: Precision components for lithography and etching chambers
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New energy vehicles: 800V high-voltage drive motor bearings
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Medical implants: Artificial hip joints, spinal fusion devices
The technology has completed laboratory R&D and is now entering the engineering commercialization phase.
