Multilayer Al2O3 Alumina Ceramic Ring For Semiconductor Hermetic Seal Plasma Resistance
Brand Name:
XQCERA
Model Number:
Customization
Place of Origin:
Hunan, China
Certification:
IATF16949;ISO9001
MOQ:
100
Price:
Customization
Delivery Time:
20-30 working days
Payment Terms:
TT wire transfer
Standard Packaging:
Carton; Pallet
Product Details
Highlight:
Multilayer Alumina Ceramic Ring
,Semiconductor Alumina Ceramic Ring
,Al2O3 Alumina Ceramic Ring
Material:
Alumina Ceramic (Al₂O₃)
Density:
3.6–3.9 G/cm³
Hardness:
≥85–90 HRA
Max Working Temperature:
1600–1700°C
Surface Finish:
Ground / Polished / Lapped
Thermal Shock Resistance:
Excellent
Electrical Insulation:
Excellent
Corrosion Resistance:
Excellent
Customization:
Size, Tolerance, Diameter, Thickness,holes, Metallization Optional
Content:
Al₂O₃ (90% / 92% / 95% / 99% / 99.8% Alumina Available)
Flexural Strength:
300–500 MPa
Compressive Strength:
≥2000 MPa
Wear Resistance:
Excellent
Precision Tolerance:
±0.001–0.03 Mm
Color:
White / Ivory
Product Description
Detailed Specifications & Features
Multilayer Alumina (Al₂O₃) Ceramic Ring for Semiconductor Applications
High-performance multilayer alumina ceramic rings engineered specifically for semiconductor manufacturing processes. These components deliver exceptional plasma resistance, hermetic sealing capabilities, and ultra-high purity required for demanding etch and CVD chamber applications.
High-purity Al₂O₃ ceramic construction for semiconductor-grade applications
Superior plasma resistance in aggressive etch and CVD environments
Reliable hermetic sealing properties for chamber integrity
Multilayer design for enhanced mechanical and thermal performance
Excellent dielectric properties and thermal stability
Material:
High-Purity Alumina (Al₂O₃)
Construction:
Multilayer Ceramic
Application:
Semiconductor Process Chambers
Process Compatibility:
Etch, CVD, Plasma Processes
Primary Applications:
Etch chamber components, CVD system seals, plasma processing equipment, semiconductor manufacturing tools, and high-vacuum applications requiring reliable ceramic performance.
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